Acta Optica Sinica, Volume. 29, Issue 11, 3057(2009)
Research on High-Precision Acquisitive Method of Surface Coordinate Information Based on Parallel Confocal Microscopy
Parallel confocal microscopy,which can detect lots of measured points simultaneously,can provide better efficiency in measurement,but bring larger off-axis aberration into the system.The horizontal offset of off-axis facula cannot be eliminated by existing data processing method,so centre-proliferation method and optic-intensity restructuring method are brought up to obtain optic-intensity displacement curves.Experimental results show that the method of centre-proliferation and optic-intensity restructuring can remove horizontal offset of about 10 μm of off-axis facula.In contrast to exiting method,the system′s stability has been increased by 2 and 5 times by these two kinds of methods,which can fit the high-precision requirement in rapid measurement.
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Yu Qing, Yu Xiaofen, Bi Meihua. Research on High-Precision Acquisitive Method of Surface Coordinate Information Based on Parallel Confocal Microscopy[J]. Acta Optica Sinica, 2009, 29(11): 3057
Category: Instrumentation, Measurement and Metrology
Received: Dec. 11, 2008
Accepted: --
Published Online: Nov. 16, 2009
The Author Email: Qing Yu (jorson.y@163.com)