Acta Optica Sinica, Volume. 12, Issue 3, 274(1992)
Optical, structural and crystalline properties of GeSb2Te4thin films
Phase change recording medium GeSb2Te4t hin film is prepared by RF-magnetron sputtering, Thermal annealing effects on the optical and structural properties of GeSb2Te4 thin films have been studied systematically. Thermal-inducedcrystalline property of amorphous GeSb2Te4 thin film has also been studied.
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[in Chinese], [in Chinese], [in Chinese]. Optical, structural and crystalline properties of GeSb2Te4thin films[J]. Acta Optica Sinica, 1992, 12(3): 274