Based on the Maxwell equations and the thermodynamics theory, the thermal and mechanical effects of the 10.6 μm narrow band filter are analysed under the irradiation of the pulse laser at different incident angles and different polarizations.The temperature field and the stress field are studied at different incident angles and polarizations. The drift effect of the narrow band filter caused by the thermal and mechanical effects are calculated. The damage thresholds under different incident angles of the laser are compared and discussed. The results show that with the increase of incident angle, the amplitude and position coordinates of the peak temperature rise change greatly. The peak value of the temperature rise induced by the P and S polarized light irradiation decrease gradually with the increasing incident angles. The position coordinates of the peak temperature rise gradually close to the interface of the filter and air along with the change of incident angle. The difference of the the thermal and mechanical effects between P and S polarized light irradiation becomes more and more obvious. The passband drift characteristics under different laser incident angles with the same laser energy are compared. When the incident angle is small, the central wavelength deviation of the filter reaches over 200 nm, and the transmittance of 10.6 μm decreases to less than 6%.With the increase of incident angle, the melting damage threshold of the filter gets bigger and bigger. The difference of melting damage threshold between P and S polarized light is very small when the angle of incidence small. When the incident angle is greater than 30°, the melting damage threshold difference between P and S polarized light becomes larger and larger.The incident angle and polarization state of the laser should be considered in order to realize the laser damage to the narrow band filter with a small power.