In order to measure the millisecond pulse laser irradiation of transparent material real-time stress and stress strain evolution process, in view of the high power solid laser interaction with materials, the method of Mach- Zehnder interference to get the interference fringes by the material damage is adopted. The on-line stress and the evolution of the material are obtained through the analysis and the processing of the change of the interference fringe. Single-crystal silicon is selected as experiment material and comsol simulation model is established based on the optical interference theory. Based on the theory and the simulation, the experiment is carried out. The error of experiment and simulation in r(x) direction is between 11.7% ~33.91%, and the error in z (y, z) direction is between 20.25% ~31.34% , which shows measuring the stress of the transparent material with Mach- Zehnder transient interference method is feasible. This provides a new method for the research of real-time stress damage and its evolution process of laser interaction with none-transparent materials.