Acta Optica Sinica, Volume. 42, Issue 19, 1936001(2022)
Characterization of Ion Beam Induced Nanoripples by Using Extreme Ultraviolet Synchrotron Radiation
Quasi-periodic nanostructures induced by ion bombardment (IB) on solid surfaces are characterized by small periods (10-100 nm) and large areas. Quasi-periodic nanoripple structures with the transverse feature size of around 100 nm and the gradually significant transverse periodicity and longitudinal continuity were fabricated on antireflection coatings by Argon-IB. To improve the characterization area, the morphological characteristics of the self-organized nanoripples were characterized by using extreme ultraviolet (EUV) scatterometry. The results show that in terms of samples, their transverse and longitudinal morphological features obtained by the in-plane and conical mode of the EUV scatterometry are in agreement with those obtained by atomic force microscope. These results demonstrate that the proposed method is feasible to characterize the basic morphological characteristics of quasi-periodic nanoripples and can provide a basis for subsequent quantitative analysis. In addition, the characterization area of self-organized nanoripple structures has reached an order of the mm2 by EUV synchrotron radiation, and the characterization range of the Metrology Beamline of Hefei Light Source is extended to self-organized nanostructures, which can provide a reference for future studies on the scattering characterization of EUV lithography masks.
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Jinyu Li, Gaoyuan Yang, Haofeng Zang, Huoyao Chen, Tonglin Huo, Hongjun Zhou, Yonghua Lu, Ying Liu, Yilin Hong, Shaojun Fu. Characterization of Ion Beam Induced Nanoripples by Using Extreme Ultraviolet Synchrotron Radiation[J]. Acta Optica Sinica, 2022, 42(19): 1936001
Category: Letters
Received: Jan. 26, 2022
Accepted: Apr. 5, 2022
Published Online: Oct. 18, 2022
The Author Email: Liu Ying (liuychch@ustc.edu.cn)