Laser & Optoelectronics Progress, Volume. 60, Issue 23, 2314001(2023)

Study on 100 kHz Repetitive Frequency Tin Droplet Targets

Haiyi Sun1, Guande Wang1, Xuehong Li1, Kailun Peng1, Jiajie Zou1, Yujie Peng1, Cheng Wang1, Yuxin Leng1、*, Jinghao Xu2, Lili Fan2, Fenghua Yuan2, Zhongliang Li2, Yang Bu2, Tianze Wang1,3,4, Ziyi Zhang1,4, Gang Xin4, and Nan Lin1,4
Author Affiliations
  • 1Key Laboratory of Ultra-intense laser Science and Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
  • 4Department of Precision Optics Engineering, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    Tin droplet generator is a crucial submodules of the light source used in laser-pulsed plasma extreme ultraviolet lithography. Such a light source requires a tin droplet target with high repetition rate, small diameter, and good stability. This study presents our recent progress on the droplet generator, encompassing the droplet diameter, repetition rate, spacing between adjacent droplets, and position stability. The generated tin droplets exhibit a diameter of ~40 μm, spacing of 230 μm between the adjacent droplets, and stable operating time of 5 h at a repetition rate of 100 kHz. Within a 10 s interval, the calculated standard deviation of the droplet positions in the vertical and horizontal directions are approximately 2 μm and 1 μm, respectively. However, the aspects of droplet usability, such as the droplet diameter, operating time, and long-term position stability require further improvement.

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    Haiyi Sun, Guande Wang, Xuehong Li, Kailun Peng, Jiajie Zou, Yujie Peng, Cheng Wang, Yuxin Leng, Jinghao Xu, Lili Fan, Fenghua Yuan, Zhongliang Li, Yang Bu, Tianze Wang, Ziyi Zhang, Gang Xin, Nan Lin. Study on 100 kHz Repetitive Frequency Tin Droplet Targets[J]. Laser & Optoelectronics Progress, 2023, 60(23): 2314001

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    Paper Information

    Category: Lasers and Laser Optics

    Received: May. 26, 2023

    Accepted: Aug. 8, 2023

    Published Online: Dec. 4, 2023

    The Author Email: Leng Yuxin (lengyuxin@siom.ac.cn)

    DOI:10.3788/LOP231380

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