Laser & Optoelectronics Progress, Volume. 60, Issue 23, 2314001(2023)
Study on 100 kHz Repetitive Frequency Tin Droplet Targets
Tin droplet generator is a crucial submodules of the light source used in laser-pulsed plasma extreme ultraviolet lithography. Such a light source requires a tin droplet target with high repetition rate, small diameter, and good stability. This study presents our recent progress on the droplet generator, encompassing the droplet diameter, repetition rate, spacing between adjacent droplets, and position stability. The generated tin droplets exhibit a diameter of ~40 μm, spacing of 230 μm between the adjacent droplets, and stable operating time of 5 h at a repetition rate of 100 kHz. Within a 10 s interval, the calculated standard deviation of the droplet positions in the vertical and horizontal directions are approximately 2 μm and 1 μm, respectively. However, the aspects of droplet usability, such as the droplet diameter, operating time, and long-term position stability require further improvement.
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Haiyi Sun, Guande Wang, Xuehong Li, Kailun Peng, Jiajie Zou, Yujie Peng, Cheng Wang, Yuxin Leng, Jinghao Xu, Lili Fan, Fenghua Yuan, Zhongliang Li, Yang Bu, Tianze Wang, Ziyi Zhang, Gang Xin, Nan Lin. Study on 100 kHz Repetitive Frequency Tin Droplet Targets[J]. Laser & Optoelectronics Progress, 2023, 60(23): 2314001
Category: Lasers and Laser Optics
Received: May. 26, 2023
Accepted: Aug. 8, 2023
Published Online: Dec. 4, 2023
The Author Email: Leng Yuxin (lengyuxin@siom.ac.cn)