Laser & Optoelectronics Progress, Volume. 49, Issue 8, 81201(2012)
Research of Minute-Particle Height Measurement Method Based on Microscopic Imaging and Projection Optics
There are some minute peaked particles on the surface of semiconductor substrate during production. Sizes of the particles are usually several microns. If the height of any particle exceeds a standard value, there will be many defect wares during snagging and buffing when processed on the assembly-line. All that could affect the producing efficiency. It is desired to give test simultaneously on the height of single or several sparsely distributed non-spherical particles. We aim at offering a method to measure the height of minute particles. We also introduce a system of measuring small particle′s height on the basis of microscopic projection and successfully measure single randomly shaped minute particle with height around 100 μm.
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Tang Chunxiao, Li Enbang, Wu Yabei. Research of Minute-Particle Height Measurement Method Based on Microscopic Imaging and Projection Optics[J]. Laser & Optoelectronics Progress, 2012, 49(8): 81201
Category: Instrumentation, Measurement and Metrology
Received: Mar. 21, 2012
Accepted: --
Published Online: Jun. 7, 2012
The Author Email: Chunxiao Tang (tangyifei82@hotmail.com)