Acta Optica Sinica, Volume. 28, Issue 12, 2431(2008)

Design and Fabrication of Al2O3/SiO2 Double-Layer Antireflection Coatings on 4H-SiC Substrate

[in Chinese]1、*, [in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2, [in Chinese]2, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    Al2O3/SiO2 double-layer UV antireflection coatings were designed and fabricated on 4H-SiC substrate, and the validity of theoretical design was further verified by scanning electron microscope (SEM) and reflection spectrum. The optimal physical thickness of Al2O3 and SiO2 is 42.0 nm and 96.1 nm respectively by programming calculation. And then the minimum reflectance of 0.09% is obtained at reference wavelength λ=280 nm. According to error analysis, keeping the sum of double-layer thickness consistent with theoretical value is helpful to reduce the reflectance. In addition, the refractive index of SiO2 should more accurate and the refractive index of Al2O3 should be controlled close to 1.715 in the experiment. Al2O3/SiO2 double-layer coatings were deposited on 4H-SiC substrate by electron beam evaporation and the physical thickness is 42 nm and 96 nm respectively. SEM images show that the deposited layers and the substrate perform good adhesion to each other. The practical minimum reflectance is 0.33% at λ=276 nm which is close to theoretical value. Compared with conventional SiO2 single layer, Al2O3/SiO2 double-layer coatings show low reflectance and better wavelength selectivity. These results make the possibility for 4H-SiC based UV optoelectronic devices with Al2O3/SiO2 films as antireflection coatings.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and Fabrication of Al2O3/SiO2 Double-Layer Antireflection Coatings on 4H-SiC Substrate[J]. Acta Optica Sinica, 2008, 28(12): 2431

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    Paper Information

    Category: Thin Films

    Received: Jan. 28, 2008

    Accepted: --

    Published Online: Dec. 17, 2008

    The Author Email: (hhl02078011@126.com)

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