Optics and Precision Engineering, Volume. 21, Issue 3, 709(2013)
Design and control of miniature piezoelectric actuator based on strain gauge sensor
A kind of miniature precise piezoelectric actuator with strain gauges is designed. The actuator uses a displacement-amplified mechanism to amplify the small strain and measure the output change of the wheat-stone bridge composed of strain gauges to obtain the displacement output indirectly. The experiments show that the accuracy of the actuator is 80 nm. Due to the complex hysteresis characteristics, it is very difficult to control this actuator. However, PID control algorithm is suitable for control of this actuator effectively in the closed loop. A position test and a tracking test at the quasi-static condition are performed to verify the performance of the actuator. Experimental results show that the control performance of the PID control algorithm is good for this actuator. It has effective positioning performance, the positioning error does not exceed 0.059 μm; the maximum tracking errors for single-frequency signal and multi-frequency signal do not exceed 0.085 μm and 0.092 μm, respectively. These results prove the validity of the control algorithm in the quasi-static condition.
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WANG Geng, GUAN Chun-lin, ZHANG Xiao-jun, ZHOU Hong, RAO Chang-hui. Design and control of miniature piezoelectric actuator based on strain gauge sensor[J]. Optics and Precision Engineering, 2013, 21(3): 709
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Received: Nov. 21, 2012
Accepted: --
Published Online: Apr. 8, 2013
The Author Email: Geng WANG (wgmouse@yahoo.com)