Acta Optica Sinica, Volume. 32, Issue 4, 412002(2012)

Measurement System of Optical Homogeneity of Large-Size Optical Material Based on Subaperture Stitching Technique

Xu Xinhua1、*, Wang Qing1, Song Bo2, and Fu Ying1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    In order to realize high-precision, low-cost measurement of optical refractive-index homogeneity of large-size optical material, an interference absolute testing method based on subaperture stitching technique is proposed and a measurement system comprised of a Zygo interferometer, a sophisticated five-dimensional adjustment air-floatation platform, subaperture stitching software and a computer is developed. The optical component under test is placed on the five-dimensional adjustment platform and all subaperture areas of the component can be measured precisely by moving the platform. Then optical-homogeneity distribution of the whole optical component is calculated out automatically by subaperture stitching software. In the experiment, a 300 mm quartz optical component is measured in stitching mode of eight subapertures by using a 180 mm interferometer. The stitching result is compared with the direct measurement result obtained by using full-aperture interferometer. The relative error of wavefront peak-to-valley value is 0.21%, the relative error of optical homogeneity value is 0.23%. This precision can be compared with the precision of directly measured result. The practicability of subaperture stitching technology of plane-type wavefront measured by using absolute test method is realized. The whole system integrates optics, mechanics, electrics and computer together and can be operated conveniently with high accuracy.

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    Xu Xinhua, Wang Qing, Song Bo, Fu Ying. Measurement System of Optical Homogeneity of Large-Size Optical Material Based on Subaperture Stitching Technique[J]. Acta Optica Sinica, 2012, 32(4): 412002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Oct. 11, 2011

    Accepted: --

    Published Online: Feb. 24, 2012

    The Author Email: Xinhua Xu (xxhfwx@163.com)

    DOI:10.3788/aos201232.0412002

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