Chinese Journal of Lasers, Volume. 20, Issue 11, 834(1993)
A scanning tunneling microscopy for the measurement of optical disk pregrooves
In this paper, a self-designed scanning tunneling microscopy (STM) with large scanning for the measurement of optical disk pregrooves is reported. The gray image, three-dimension topography and cross- section profile of pregrooves are given. A new effective appraoch is proposed for evaluating pregrooves.
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[in Chinese], [in Chinese]. A scanning tunneling microscopy for the measurement of optical disk pregrooves[J]. Chinese Journal of Lasers, 1993, 20(11): 834