Optoelectronics Letters, Volume. 8, Issue 3, 182(2012)

Symmetrical fully-etched and chirped beam splitter basedon a subwavelength binary blazed grating

Wei ZHOU*, Hua-liang ZHANG, Jun-bo YANG, and Jun-cai YANG
Author Affiliations
  • College of Science, National University of Defense Technology, Changsha 410073, China
  • show less

    A novel symmetrical chirped beam splitter based on a binary blazed grating is proposed, which adopts the fully-etched grating structure compatible with the current fabrication facilities for CMOS technology and convenient for integration and manufacture process. This structure can realize nearly equal-power splitting operation under the condition of TE polarization incidence. When the absolutely normal incidence occurs at the wavelength of 1580 nm, the coupling efficiencies of the left and the right branches are 43.627% and 43.753%, respectively. Moreover, this structure has the tolerances of 20 nm in etched depth and 3o in incident angle, which is rather convenient to manufacture facility.

    Tools

    Get Citation

    Copy Citation Text

    ZHOU Wei, ZHANG Hua-liang, YANG Jun-bo, YANG Jun-cai. Symmetrical fully-etched and chirped beam splitter basedon a subwavelength binary blazed grating[J]. Optoelectronics Letters, 2012, 8(3): 182

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Dec. 21, 2011

    Accepted: --

    Published Online: Jul. 12, 2017

    The Author Email: Wei ZHOU (fangzhouwei@163.com)

    DOI:10.1007/s11801-012-1204-2

    Topics