Optics and Precision Engineering, Volume. 24, Issue 1, 134(2016)

Optimization of quadrature error correction method for silicon MEMS gyroscopes

CAO Hui-liang1...2,3,*, WANG Yu-liang4, SHI Yun-bo1,2, SHEN Chong1,2, LI Hong-sheng3, LIU Jun1,2, and YANG Zhi-cai12 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    This paper focuses on finding out a optimum quadrature error correction method for a dual-mass Micro-electro-mechanical System (MEMS) gyroscope with quadrature error correction combs and sense feedback combs. The structure of the gyroscope was introduced, and influences of quadrature errors on the output signals were simulated and quantized. The results show that quadrature error equivalent angular rate is 200(°)/s and the demodulation phase error is less than 2°, which generates 15(°)/s variation of output signal. Three kinds of quadrature error correction methods used commonly in measuring this structure were investigated, and they are Charge Injecting Method (CIM), Quadrature Force Correction Methods (QFCM) and Quadrature Coupling Stiffness Correction Method (QCSCM). The feasibility of the three method was verified in theory. A gyroscope without quadrature error correction was tested, the results show that the quadrature signal peak-peak amplitudes from left and right mass preamplifiers are 150 mV and 300 mV respectively. Then, the correction method based on left mass and right mass independently was proposed. The the experiments based on CIM, QFCM and QCSCM were performed. The results show that the quadrature error signals are eliminated basically, their bias values and bias stabilities are -8.361(°)/s and 423(°)/h, 2.419(°)/s and 82(°)/h, 1.751(°)/s and 25(°)/h, respectively. According to the results, the QCSCM is verified to be the optimal method for quadrature error correction, and the theory analysis result is correct.

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    CAO Hui-liang, WANG Yu-liang, SHI Yun-bo, SHEN Chong, LI Hong-sheng, LIU Jun, YANG Zhi-cai. Optimization of quadrature error correction method for silicon MEMS gyroscopes[J]. Optics and Precision Engineering, 2016, 24(1): 134

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    Paper Information

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    Received: May. 15, 2015

    Accepted: --

    Published Online: Mar. 22, 2016

    The Author Email: Hui-liang CAO (caohuiliang@nuc.edu.cn)

    DOI:10.3788/ope.20162401.0134

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