Acta Optica Sinica, Volume. 9, Issue 4, 327(1989)

A study of reflectivity-measurement in far ultraviolet and vacuum ultraviolet

ZHUANG DAKUI, SHI YIFAN, LIU YASHU, YANG TIAKLI, and Liu HUA
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    A new method for measuring reflectivity in the spectum of far ultraviolet and vacuum ultraviolet is described in this paper. The instrument designed features an optical system, a look-in amplifying detection technique in connexion with a data processing computer. The accuracy is better than ±5×10-3 and the precision better than ±5×10-4.

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    ZHUANG DAKUI, SHI YIFAN, LIU YASHU, YANG TIAKLI, Liu HUA. A study of reflectivity-measurement in far ultraviolet and vacuum ultraviolet[J]. Acta Optica Sinica, 1989, 9(4): 327

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 21, 1988

    Accepted: --

    Published Online: Sep. 20, 2011

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