Acta Optica Sinica, Volume. 35, Issue 11, 1112008(2015)
An Optimal Method of Calculating Phase Shift Interference Step Based on Inter-Pixel Algorithm
For phase-shifting interferometry, the inter-pixel algorithm with ellipse fit is a kind of effective method to get the phase shift steps. The key of improving the precision is to search two groups of pixels, whose phase difference is π/2, from the interferogram. Therefore,The two interferograms with phase difference π/2 are chosen by calculating the zero and peak positions for local gray mean values of all interferograms. Using these two interferograms, a method is presented to find two groups of pixels of phase difference π/2 with maximum number for the whole image based on four gray comparison methods. The experiment shows that the proposed method has higher accuracy and universality than the traditional method.
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Wang Xuanze, Yang Liangen, Zhai Zhongsheng, Wu Wenjun, Xu Zhongbao. An Optimal Method of Calculating Phase Shift Interference Step Based on Inter-Pixel Algorithm[J]. Acta Optica Sinica, 2015, 35(11): 1112008
Category: Instrumentation, Measurement and Metrology
Received: Apr. 10, 2015
Accepted: --
Published Online: Oct. 15, 2015
The Author Email: Xuanze Wang (wangxz@mail.hbut.edu.cn)