Acta Optica Sinica, Volume. 31, Issue 4, 412003(2011)

3D Profile Measurement for Micro-Optical Component by Using Digital Holographic Microscopy

Wang Yunxin1,2、*, Wang Dayong1,2, Zhao Jie1,2, Li Yan1,2, and Wan Yuhong1,2
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  • 1[in Chinese]
  • 2[in Chinese]
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    Digital holographic microscopy (DHM) is proposed for the three-dimensional (3D) profile measurement of the micro-optical components, which is characterized by its non-invasion, non-contact, high-speed, and full-wave field scheme. Firstly, the configuration of lensless Fourier-transform DHM is designed and built. The complex amplitude of the full-wave field is reconstructed by a single inverse fast Fourier transform only. The phase aberration is corrected by the two-step phase subtraction method, and the unwrapped phase information is extracted by using the least-squares phase-unwrapping algorithm. Then the profile information of the sample can be obtained. In the experiments, the profile of the micro-lens arrays is measured by the proposed configuration, and the results show that the caliber and relief depth are 1.595 mm and 2.424 μm respectively. These are in good agreement with the results given by the white-light interferometer. It demonstrates that the lensless Fourier-transform DHM is feasible and effective for the 3D profile measurement of the micro-optical components.

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    Wang Yunxin, Wang Dayong, Zhao Jie, Li Yan, Wan Yuhong. 3D Profile Measurement for Micro-Optical Component by Using Digital Holographic Microscopy[J]. Acta Optica Sinica, 2011, 31(4): 412003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 21, 2010

    Accepted: --

    Published Online: Mar. 30, 2011

    The Author Email: Yunxin Wang (yxwang@bjut.edu.cn)

    DOI:10.3788/aos201131.0412003

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