Laser & Optoelectronics Progress, Volume. 59, Issue 21, 2116003(2022)
Preparation of Porous Silicon-Based VO2 Nanoparticle Composites and Study on Enhancing Room Temperature Gas Sensitivity of NO2
It is proposed to grow VO2 nanoparticles on the surface of porous silicon using a chemical vapor transport deposition method to form a porous silicon-based VO2 nanoparticles composite structure for improving the sensitivity of porous silicon to NO2 gas at room temperature. The size of VO2 nanoparticles is altered by varying the VO2 deposition pressure and research is conducted on its effect on the gas sensitivity of the porous silicon-based VO2 nanoparticle composite structure at room temperature. The microscopic morphology, phase, and crystal structure of the composite structure are characterized and analyzed using a field emission scanning electron microscope, X-ray diffractometer, energy spectrometer, and transmission electron microscope. The experimental results demonstrate that the composite structure obtained at the deposition pressure of 330 Pa has the highest room temperature sensitivity (13.15) to the mole fraction of 5×10-6 NO2, which is 5.95 times the sensitivity of porous silicon, and has good selectivity. The excellent NO2 gas sensitivity is due to the surface activity enhancement of VO2 nanoparticles with small particle size and the formation of a wider depletion layer between the smaller VO2 nanoparticles and porous silicon, thus improving gas sensitivity. This research will help to improve the application of porous silicon in NO2 gas sensor.
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Jiran Liang, Ying Zhang, Wenhao Wu, Qun Lou. Preparation of Porous Silicon-Based VO2 Nanoparticle Composites and Study on Enhancing Room Temperature Gas Sensitivity of NO2[J]. Laser & Optoelectronics Progress, 2022, 59(21): 2116003
Category: Materials
Received: Sep. 6, 2021
Accepted: Nov. 5, 2021
Published Online: Oct. 24, 2022
The Author Email: Liang Jiran (liang_jiran@tju.edu.cn)