Optoelectronics Letters, Volume. 15, Issue 1, 1(2019)

A slot microring sensor with feedback spiral waveguide for trace gas CH4 sensing in mid-infrared region

Kai-he XIE, Xin ZHANG*, Xiao-wei ZHANG, Han JIN, and Jia-wen JIAN
Author Affiliations
  • Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China
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    In this paper, a slot microring resonator with a piece of spiral feedback waveguide for CH4 sensing application is pro-posed. This sensor is based on silicon-on-insulator (SOI) substrate and with the operation wavelength in mid-infrared region. To reach high sensitivity and good selectivity, slot cross section and spiral feedback waveguide are carefully tailored. The sensor shows ppb-scale trace gas sensing potential and is easy to be packaged in integrated photonics circuits. Calculation results show that the sensitivity reaches 1.4×10-2 dB/ppm and the detection limit achieves 700 ppb in the case of Lspiral=100Lr.

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    XIE Kai-he, ZHANG Xin, ZHANG Xiao-wei, JIN Han, JIAN Jia-wen. A slot microring sensor with feedback spiral waveguide for trace gas CH4 sensing in mid-infrared region[J]. Optoelectronics Letters, 2019, 15(1): 1

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    Paper Information

    Received: Jul. 3, 2018

    Accepted: Aug. 2, 2018

    Published Online: Apr. 11, 2019

    The Author Email: Xin ZHANG (zhangxin_nbu@163.com)

    DOI:10.1007/s11801-019-8107-4

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