Acta Optica Sinica, Volume. 15, Issue 6, 824(1995)

Float Polishing Subnanometer-Smooth Surface

[in Chinese], [in Chinese], and [in Chinese]
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    This paper is a summary about our current work on supersmooth surface by float polishing. The basic configuration of a prototype machine is described, and some parameters for polishing subnanometer-smooth surface are presented with the recent measurement results of surface roughness.

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    [in Chinese], [in Chinese], [in Chinese]. Float Polishing Subnanometer-Smooth Surface[J]. Acta Optica Sinica, 1995, 15(6): 824

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    Paper Information

    Category: Rapid communications

    Received: Sep. 12, 1994

    Accepted: --

    Published Online: Aug. 17, 2007

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