Acta Optica Sinica, Volume. 15, Issue 6, 824(1995)
Float Polishing Subnanometer-Smooth Surface
This paper is a summary about our current work on supersmooth surface by float polishing. The basic configuration of a prototype machine is described, and some parameters for polishing subnanometer-smooth surface are presented with the recent measurement results of surface roughness.
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[in Chinese], [in Chinese], [in Chinese]. Float Polishing Subnanometer-Smooth Surface[J]. Acta Optica Sinica, 1995, 15(6): 824