Acta Optica Sinica, Volume. 42, Issue 15, 1524002(2022)

Fabrication of Nanosphere SERS Substrates Based on Mixed Electron Beam Resists

Yixuan Zhou1,2, Jing Yang3, Taoran Xu2, Zhi Qiao2, Da Mu1、*, Peipei Chen2,4、**, and Weiguo Chu2,4、***
Author Affiliations
  • 1School of Electro-Optical Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin , China
  • 2Nanofabrication Laboratory, CAS Key Laboratory for Nanophotonic Materials and Devices, CAS Excellent Center for Nanoscience, National Center for Nanoscience and Technology, Beijing 100190, China
  • 3State Environmental Protection Key Laboratory of Quality Control in Environmental Monitoring, China National Environmental Monitoring Centre, Beijing 100012, China
  • 4Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    A method of fabricating surface-enhanced Raman scattering (SERS) substrate by one-step exposure of mixed electron beam resists is reported. Stable and scattered nanospheres were produced by mixing immiscible hydrogen silsesquioxane (HSQ) and polymethyl methacrylate (PMMA) electron beam resists in equal quantity, followed by electron beam exposure with an appropriate dosage of 2000 μC/cm2 and development. Thin Au film was then deposited using electron beam evaporation to form SERS substrates with superior Raman enhancement effects. The size distribution of the microspheres with the relative standard deviation of 7.56% is uniform, and the gaps between rough Au layers and the nanospheres could provide abundant SERS "hot spots". The SERS substrates thus fabricated showed superior performance for different targets. A SERS enhancement factor of 5.8×106 and detection limit of 1.06×10-8 mol/L for 4-mercaptophenylboronic acid (4-MPBA), and the detection limits of 7.08×10-9 mol/L for rhodamine 6G (R6G) and 7.94×10-10 mol/L for melamine in water were achieved. For melamine, a wide detection range (1.0×10-9-1.0×10-5 mol/L) with a good linearity (R2=0.952) was achieved. The pronounced performance of detecting melamine makes the SERS substrates very overwhelming among the ones reported. The facile and repeatable approach of preparing high-performance SERS substrates by exposing the mixture of different resists proposed here is undoubtedly favorable for the exploration of novel SERS substrates and their fabrication.

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    Yixuan Zhou, Jing Yang, Taoran Xu, Zhi Qiao, Da Mu, Peipei Chen, Weiguo Chu. Fabrication of Nanosphere SERS Substrates Based on Mixed Electron Beam Resists[J]. Acta Optica Sinica, 2022, 42(15): 1524002

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    Paper Information

    Category: Optics at Surfaces

    Received: Jan. 27, 2022

    Accepted: Mar. 7, 2022

    Published Online: Aug. 4, 2022

    The Author Email: Mu Da (muda@cust.edu.cn), Chen Peipei (chenpp@nanoctr.cn), Chu Weiguo (wgchu@nanoctr.cn)

    DOI:10.3788/AOS202242.1524002

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