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Acta Photonica Sinica, Volume. 31, Issue 10, 1281(2002)

DESIGNING THE PATTERN OF REFERENCE MARK WITH CAD

[in Chinese]... [in Chinese], [in Chinese], [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. DESIGNING THE PATTERN OF REFERENCE MARK WITH CAD[J]. Acta Photonica Sinica, 2002, 31(10): 1281

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    Received: Apr. 2, 2002

    Accepted: --

    Published Online: Sep. 18, 2007

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology