Optoelectronics Letters, Volume. 12, Issue 2, 128(2016)

Fabrication and characterization of transparent conducting titanium-zinc oxide nanostructured thin films

Zhou LU1... Lu LONG1, Zhi-you ZHONG1,2,*, Jin HOU1,2, Chun-yong YANG1,2, Jin-hua GU3 and Hao LONG1 |Show fewer author(s)
Author Affiliations
  • 1College of Electronic Information Engineering, South-Central University for Nationalities, Wuhan 430074, China
  • 2Hubei Key Laboratory of Intelligent Wireless Communications, South-Central University for Nationalities, Wuhan 430074, China
  • 3Center of Experiment Teaching, South-Central University for Nationalities, Wuhan 430074, China
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    Nano transparent conducting titanium-zinc oxide (Ti-ZnO) thin films were prepared on glass substrates by radio frequency (RF) magnetron sputtering technique. The deposited films are characterized by X-ray diffraction (XRD), four-probe meter and UV-visible spectrophotometer. The effects of Ti-doping content on the structural, optical and electrical properties of the films are investigated. The XRD results show that the obtained films are polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The structural and optoelectronic characteristics of the deposited films are subjected to the Ti-doping content. The Ti-ZnO sample fabricated with the Ti-doping content of 3% (weight percentage) possesses the best crystallinity and optoelectronic performance, with the highest degree of preferred (002) orientation of 99.87%, the largest crystallite size of 83.2 nm, the minimum lattice strain of 6.263×10-4, the highest average visible transmittance of 88.8%, the lowest resistivity of 1.18×10-3Ω·cm and the maximum figure of merit (FOM) of 7.08×103Ω-1·cm-1. Furthermore, the optical bandgaps of the films are evaluated by extrapolation method and observed to be an increasing tendency with the increase of the Ti-doping content.

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    LU Zhou, LONG Lu, ZHONG Zhi-you, HOU Jin, YANG Chun-yong, GU Jin-hua, LONG Hao. Fabrication and characterization of transparent conducting titanium-zinc oxide nanostructured thin films[J]. Optoelectronics Letters, 2016, 12(2): 128

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    Paper Information

    Received: Dec. 9, 2015

    Accepted: --

    Published Online: Oct. 12, 2017

    The Author Email: Zhi-you ZHONG (zyzhongzy@163.com)

    DOI:10.1007/s11801-016-5256-6

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