Acta Optica Sinica, Volume. 41, Issue 19, 1928003(2021)

High-Sensitivity Terahertz Microfluidic Sensor Based on Irregular U-type Structure

Zongren Li1, Hu Deng1,2,3、*, Jieping Yang1, Quancheng Liu1, Jin Guo1, and Liping Shang1,2,3
Author Affiliations
  • 1School of Information Engineering, Southwest University of Science and Technology, Mianyang, Sichuan 621010, China
  • 2Key Laboratory of Special Environment Robotics of Sichuan Province, Mianyang, Sichuan 621010, China
  • 3Joint Laboratory for Extreme Conditions Matter Properties, Research Center of Laser Fusion, China Academy of Engineering Physics, Southwest University of Science and Technology, Mianyang, Sichuan 621010, China
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    A high-sensitivity terahertz microfluidic sensor based on the irregular U-type structure is proposed. The influence of the length, width, and angle of the metal wires in the sensor’s metal structure on the quality factor (Q factor) and the absorptivity of the sensor and that of the microfluidic channel height and the cap thickness on the sensing properties of the sensor are studied with simulation software. Finally, the detection performance of the sensor in glucose solutions at different mass fraction is calculated by simulation. The results show that the best combination of structural parameters for the sensor is L1=84 μm, L2=82 μm, L3=52 μm, W=5 μm, and θ=60°, in which case the Q factor of the sensor can reach 24 and the sensitivity can reach 313 GHz/RIU. In short, this kind of microfluidic sensor with a high Q factor and high sensitivity has great application value in the field of label-free trace detection.

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    Zongren Li, Hu Deng, Jieping Yang, Quancheng Liu, Jin Guo, Liping Shang. High-Sensitivity Terahertz Microfluidic Sensor Based on Irregular U-type Structure[J]. Acta Optica Sinica, 2021, 41(19): 1928003

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    Paper Information

    Category: Remote Sensing and Sensors

    Received: Feb. 22, 2021

    Accepted: Apr. 23, 2021

    Published Online: Sep. 15, 2021

    The Author Email: Deng Hu (denghu@swust.edu.cn)

    DOI:10.3788/AOS202141.1928003

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