Chinese Optics Letters, Volume. 5, Issue 4, 211(2007)

Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer

Guotian He1,2、*, Xiangzhao Wang1,2, Aijun Zeng1,2, Feng Tang1,2, and Bingjie Huang3
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
  • 2Graduate School of the Chinese Academy of Sciences, Beijing 100039
  • 3Shanghai Hengyi Optics and Fine Mechanics Co., Ltd., Shanghai 201800
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    To resolve the conflict of large measurement range and high accuracy in the existing real-time laser diode (LD) interferometers for displacement measurement, a novel real-time LD interferometry for displacement measurement is proposed and its measurement principle is analyzed. By use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping, the measurement accuracy is improved, and the measurement range is enlarged to a few wavelengths. In experiments, the peak-to-peak amplitude of the speaker vibration was 2361.7 nm, and the repeatability was 2.56 nm. The measurement time was less than 26 microseconds.

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    Guotian He, Xiangzhao Wang, Aijun Zeng, Feng Tang, Bingjie Huang. Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer[J]. Chinese Optics Letters, 2007, 5(4): 211

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    Paper Information

    Received: Oct. 27, 2006

    Accepted: --

    Published Online: Jun. 26, 2007

    The Author Email: Guotian He (slhgt@siom.ac.cn)

    DOI:

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