Acta Optica Sinica, Volume. 5, Issue 3, 248(1985)
Determination of surface roughness by correlation of laser speckle in real time
This paper proposes and discusses a new set-up for realtime measurement of surface roughness by correlation of laser speckle patterns. The rough surface is illuminated simultaneously by two plane waves which are obtained from a laser after angular spliting by a biprism. Selecting a small angle of biprism and small angle of incidence, the measurement of roughness covers a dynamic range of 1μm. Finally, the experimental results thus obtained are compared with metrologioal measurement by TALYSURF-5, the agreement of the data is well.
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ZHENG YUeMING, WANG CE, LING DEHONG. Determination of surface roughness by correlation of laser speckle in real time[J]. Acta Optica Sinica, 1985, 5(3): 248