Acta Optica Sinica, Volume. 5, Issue 3, 248(1985)

Determination of surface roughness by correlation of laser speckle in real time

ZHENG YUeMING, WANG CE, and LING DEHONG
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  • [in Chinese]
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    This paper proposes and discusses a new set-up for realtime measurement of surface roughness by correlation of laser speckle patterns. The rough surface is illuminated simultaneously by two plane waves which are obtained from a laser after angular spliting by a biprism. Selecting a small angle of biprism and small angle of incidence, the measurement of roughness covers a dynamic range of 1μm. Finally, the experimental results thus obtained are compared with metrologioal measurement by TALYSURF-5, the agreement of the data is well.

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    ZHENG YUeMING, WANG CE, LING DEHONG. Determination of surface roughness by correlation of laser speckle in real time[J]. Acta Optica Sinica, 1985, 5(3): 248

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 17, 1984

    Accepted: --

    Published Online: Sep. 16, 2011

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