Acta Optica Sinica, Volume. 24, Issue 10, 1375(2004)
Design and Fabrication of Optically Readable Infrared Thermal Imaging Device Based on Fabry-Perotw Micro-Cavity Array
This paper presents the design and fabrication of a novel optically readable thermal imaging device based on Fabry-Perot micro-cavity array made on silicon substrate, which directly translates thermal imaging into visible imaging by using optically readable technology. The focal plane array(FPA) of this device is a Fabry-Perot micro-cavity array based on microelectromechanical system (MEMS) technology. The structure and thermo-mechanical designs of movable micromirror, and the design of the visible readable setup are completed. Theoretical analysis indicates
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and Fabrication of Optically Readable Infrared Thermal Imaging Device Based on Fabry-Perotw Micro-Cavity Array[J]. Acta Optica Sinica, 2004, 24(10): 1375