Investigation of soft X-ray transmission grating made by ion beam etching technique

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 12, Issue 9, 825(1992)

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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Abstract Get PDF(in Chinese)

Soft X-ray gold transmission grating with polyimide membrance substrate is fabricated by holograph-ion beam etching technique. The exposure, development and etch conditions for fabricating grating are investigated and its experimental results used in inertial confinement fusion are given in this paper.

Keywords

soft X-ray transmission grating ion beam etching

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Investigation of soft X-ray transmission grating made by ion beam etching technique[J]. Acta Optica Sinica, 1992, 12(9): 825

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Paper Information

Category: Optical Devices

Received: Sep. 9, 1991

Accepted: --

Published Online: Sep. 11, 2007

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology