Piezoelectrics & Acoustooptics, Volume. 42, Issue 1, 67(2020)

A Narrowband Temperature Compensated SAW Filter

LENG Junlin... DONG Jiahe, LU Chuan, CHEN Yunxiang, LI Hualin, CHEN Shangquan, PENG Xiao, KOU Jun, TANG Yonghong and MI Jia |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less

    A narrowband temperature compensated SAW (TC-SAW) filter with near zero temperature coefficient of frequency (TCF) is developed in this work. The blackened 42° Y-X LiTaO3 wafer was adopted as the substrate and SiO2 film was used as the temperature compensated layer. A flattened SiO2 thin film was obtained by CMP method. A TC-SAW filter prototype was fabricated and tested. The tested results showed that the TC-SAW filter had a center frequency of 1 360 MHz and only 390 kHz frequency drift with temperature in the range of -55 ℃ to 85 ℃, the temperature coefficient of frequency(TCF) was about -2×10-6/℃ and insertion loss was about 1.3 dB.

    Tools

    Get Citation

    Copy Citation Text

    LENG Junlin, DONG Jiahe, LU Chuan, CHEN Yunxiang, LI Hualin, CHEN Shangquan, PENG Xiao, KOU Jun, TANG Yonghong, MI Jia. A Narrowband Temperature Compensated SAW Filter[J]. Piezoelectrics & Acoustooptics, 2020, 42(1): 67

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Oct. 14, 2019

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email:

    DOI:10-11977/j.issn.1004-2474.2020-01-016

    Topics