To improve the crystal X-ray diffraction efficiency in wavelength range of 0.1~20 nm, it is processed that crystal surface is dealt with specific technique. Those crystals, such as mica、α-quartz and LiF, are cleaved slice of 80 mm×10 mm, with LiF crystal thickness of 1 mm, other crystals thickness of 0.2 mm. LiF crystal is heated up to about 400 ℃, then bended by curved-machine time after time and cooled to room temperature by natural, resulting in a so-called dislocation phenomenon which leads to enhance diffractive efficiency. The experience is carried on a Cu target X-ray diffractometer (XRD) with wavelength of 0.154 nm. Muti-diffractive phenomenon happens on mica spherical surface crystal. Double intensity is achieved on processed LiF crystal surface compared to original crystal. The experimental results show that it is more suitable to diagnose soft X-ray after treating the crystal surface for improving dislocation.