Opto-Electronic Engineering, Volume. 36, Issue 11, 48(2009)
Design, Fabrication and Self-focusing Properties of Varied Line-space Grating
The self-focusing properties, design, fabrication and diffraction properties of Varied Line-Space (VLS) grating were investigated in detail. The VLS grating was automatically optimized and generated by the macro program. The 300 l/mm transmission VLS grating operating at 355 nm was fabricated by e-beam lithography. The diffraction properties of VLS grating were characterized with focusing-spot testing system. The diffraction peaks of fabricated VLS grating were measured with a frequency tripled Nd:YAG laser. Moreover, the experimental results were compared with those using He-Ne laser. It has been indicated that the VLS grating of active design has promising ability to significantly improve the diffraction intensity and spectrum resolution.
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JIN Fei-fei, LIU Shi-bing, ZHU Xiao-li, XIE Chang-qing, LIU Ming. Design, Fabrication and Self-focusing Properties of Varied Line-space Grating[J]. Opto-Electronic Engineering, 2009, 36(11): 48
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Received: Mar. 19, 2009
Accepted: --
Published Online: Jan. 31, 2010
The Author Email: Fei-fei JIN (jff1983@126.com)