Chinese Journal of Quantum Electronics, Volume. 20, Issue 4, 501(2003)
Preliminary Experimental Study on the Resolution of the Optical-electro Imaging System at 30.4 nm
An imaging system based on MCP (MicroChannel plate) detector is designed to image the extreme ultraviolet (EUV) light at 30.4 nm. The image of a 3 mm-width-slit is obtained by this imaging system. Its spatial resolution of 490 μm is demonstrated. Moreover, all kinds of factors influencing the resolution of the imaging system and the measures to improve the resolution are analyzed in this paper.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Preliminary Experimental Study on the Resolution of the Optical-electro Imaging System at 30.4 nm[J]. Chinese Journal of Quantum Electronics, 2003, 20(4): 501
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