Semiconductor Optoelectronics, Volume. 42, Issue 5, 716(2021)
Research on Manufacturing Process of Cylindrical Microlens Array Mold Based on Ultra-precision Cutting
The production process of precision molds used in cylindrical microlens nanoimprint was simulated, and ultra-precision cutting technology is one of the effective means for processing precision imprinting mold. Based on the Johnson-Cook constitutive model, the finite element analysis method was applied to simulate the relationship between the cutting parameters and the cutting force during the ultra-precision cutting process, and the preferred cutting parameters were obtained. Experimental results show that the cylindrical microlens array mold can obtain good cutting effect using the preferred cutting parameters. The surface precision RMS value and the surface roughness Sq of the mold after cutting reaches 19 and 4nm, respectively.
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QING Jianhong, LI Yun. Research on Manufacturing Process of Cylindrical Microlens Array Mold Based on Ultra-precision Cutting[J]. Semiconductor Optoelectronics, 2021, 42(5): 716
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Received: Jul. 17, 2021
Accepted: --
Published Online: Nov. 6, 2021
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