Journal of Applied Optics, Volume. 44, Issue 4, 816(2023)

White-light interference demodulation algorithm based on SVMD-HD denoising

Lun XING1...2, Mei SANG1,2,*, Zhenman SHI1,2, Shuang WANG1,2, and Tiegen LIU12 |Show fewer author(s)
Author Affiliations
  • 1School of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China
  • 2Key Laboratory of Opto-electronics Information Technology (Ministry of Education), Tianjin 300072, China
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    Vertical-scanning white light interferometry (VSWLI) is a non-contact three-dimensional surface profile measurement method. As an inherent defect in VSWLI, the batwings are especially significant at the step edge when the step height of the measured sample is smaller than the coherent length of the light source. The phase-shifting interferometry does not suffer from it, but has phase ambiguity problems. A white-light interference demodulation algorithm that combined Carré equal-step phase-shifting algorithm with fast Fourier transform (FFT) coherence-peak-sensing technique was proposed to overcome the above problems. This algorithm was based on successive variational mode decomposition (SVMD) combined with Hausdorff distance (HD) denoising. The continuous step devices at 500 nm and 1 200 nm height and the standard steps at 10 μm height were used as test samples for verification of experimental measurements. The proposed algorithm can effectively suppress the batwings effect at the step edges and remove the phase-ambiguity problems.

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    Lun XING, Mei SANG, Zhenman SHI, Shuang WANG, Tiegen LIU. White-light interference demodulation algorithm based on SVMD-HD denoising[J]. Journal of Applied Optics, 2023, 44(4): 816

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    Paper Information

    Category: Research Articles

    Received: Sep. 9, 2022

    Accepted: --

    Published Online: Aug. 10, 2023

    The Author Email:

    DOI:10.5768/JAO202344.0403002

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