Infrared and Laser Engineering, Volume. 36, Issue 4, 464(2007)
Analysis on the films of SiGe heterostructure prepared by magnetron sputtering
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[in Chinese], [in Chinese], [in Chinese]. Analysis on the films of SiGe heterostructure prepared by magnetron sputtering[J]. Infrared and Laser Engineering, 2007, 36(4): 464
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