Optoelectronics Letters, Volume. 10, Issue 2, 88(2014)

Fabrication of high aspect ratio gratings for X-ray imaging

Shuang-yue HOU1, Ying XIONG1, Shan CHEN1, Peng-hui XIONG1,2, Xiang-yu CHEN2, Xiao-bo ZHANG1, Yang-chao TIAN1, and Gang LIU1、*
Author Affiliations
  • 1National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
  • 2Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
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    Grating-based X-ray imaging system is an important tool to investigate the inner structure of thick samples. The key components of the system consist of three golden gratings. The high aspect ratio gratings are fabricated using the SU-8 material. Considering the grating linewidth broadening varies with exposure dose, the relationship between linewidth broadening and exposure dose is studied experimentally. A series of gratings with different periods and different duty cycles are designed by optimizing the linewidth and exposure dose. Finally, the gratings are successfully fabricated by combining UV lithography and electroplating.

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    HOU Shuang-yue, XIONG Ying, CHEN Shan, XIONG Peng-hui, CHEN Xiang-yu, ZHANG Xiao-bo, TIAN Yang-chao, LIU Gang. Fabrication of high aspect ratio gratings for X-ray imaging[J]. Optoelectronics Letters, 2014, 10(2): 88

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    Paper Information

    Received: Nov. 21, 2013

    Accepted: --

    Published Online: Oct. 12, 2017

    The Author Email: Gang LIU (liugang@ustc.edu.cn)

    DOI:10.1007/s11801-014-3220-x

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