Optics and Precision Engineering, Volume. 21, Issue 7, 1734(2013)

Modeling of sensing interface for micromachined gyroscope and its front-end optimization

ZHAO Yang*... QIU An-ping, SHI Qin and ZHAO Jian |Show fewer author(s)
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    To improve the resolving limit of a micromachined gyroscope, a sensing interface model for the micromachined gyroscope fabricated by Silicon on Insulator(SOI) process was established, and a matching front-end was designed. Firstly, a RC lumped parameter model for the gyroscope was established based on the practical gyroscope structure, then a noise model for the sensing interface was built. The dominant noise source and methods to improve the resolving limit were analyzed. Finally, on the foundation of a TIA front-end, an improved T-network front-end was designed to match the sensing interface. Experimental results indicate that the T-network front-end improves the sensing interface equivalent input noise current from 1.18 pA/√Hz to 0.27 pA/√Hz, corresponding to a capacitive resolution of 0.62 aF/√Hz as compared to those of the transimpedance front-end. It suggests that the improved T-network front-end can reach a better resolution.

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    ZHAO Yang, QIU An-ping, SHI Qin, ZHAO Jian. Modeling of sensing interface for micromachined gyroscope and its front-end optimization[J]. Optics and Precision Engineering, 2013, 21(7): 1734

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    Paper Information

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    Received: Feb. 25, 2013

    Accepted: --

    Published Online: Aug. 5, 2013

    The Author Email: Yang ZHAO (zhaoyang0216@yeah.net)

    DOI:10.3788/ope.20132107.1734

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