Acta Optica Sinica, Volume. 39, Issue 12, 1212001(2019)
Chromatic Confocal Measurement Method Using Color Camera and Color Conversion Algorithm
In this study, we propose a chromatic confocal measurement method that employs a color camera. The chromatic confocal measurement technology is extensively used in microscopic detection, biomedical applications, and other fields because of its sub-micron or even nanometer axial resolution and the advantage of obtaining height information without axial scanning. Furthermore, a color conversion algorithm is proposed and optimized by simulations to establish the corresponding relationship between the axial height and color. Experimental results indicate that the proposed color conversion algorithm can establish a good linearity between the axial height and color, and the linear judgment coefficient is R2=0.9979. We evaluate a step with a height of 100 μm and observe that the measurement accuracy can reach the sub-micron level. We also measure the coin surface and observe that our color conversion algorithm can reconstruct the three-dimensional surface topography of the coin after correcting a series of errors.
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Kun Zhang, Qing Yu, Zungui Shao, Yi Zhang, Fang Cheng, Shiwei Fu. Chromatic Confocal Measurement Method Using Color Camera and Color Conversion Algorithm[J]. Acta Optica Sinica, 2019, 39(12): 1212001
Category: Instrumentation, Measurement and Metrology
Received: Jun. 14, 2019
Accepted: Aug. 8, 2019
Published Online: Dec. 6, 2019
The Author Email: Yu Qing (yuqing@hqu.edu.cn), Cheng Fang (yuqing@hqu.edu.cn)