Acta Optica Sinica, Volume. 26, Issue 11, 1605(2006)

Improvement on Measuring Grating Parameters with Diffraction Orders of m=±1 Efficiencies Ratio

[in Chinese]*, [in Chinese], and [in Chinese]
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    A method to measure the grating parameters with the incident efficiencies ratio from both sides of the grating with the same wavelength is proposed. The proposed method has a higher precision than the original approach with the diffraction orders of m=±1 efficiencies ratio from one side of the grating. Firstly, by comparing the sensitivity of diffraction efficiency ratio to surface roughness under the condition of one side incidence and two-side incidence, it is found the former is more sensitive than the latter; secondly, the sine surface grating parameters are simulated for two-side incidence; finally, the volume phase holographic grating parameters are obtained experimentally more accurately. Meanwhile, the new method retains the advantage of the original method, such as no damage, simplicity and low cost.

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    [in Chinese], [in Chinese], [in Chinese]. Improvement on Measuring Grating Parameters with Diffraction Orders of m=±1 Efficiencies Ratio[J]. Acta Optica Sinica, 2006, 26(11): 1605

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    Paper Information

    Category: Diffraction and Gratings

    Received: Dec. 26, 2005

    Accepted: --

    Published Online: Nov. 20, 2006

    The Author Email: (zhanglijuan.6688@163.com)

    DOI:

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