Acta Optica Sinica, Volume. 29, Issue 12, 3515(2009)

GaN-based 512×1 Ultroviolet linear Focal Plane Arrays

Zhang Yan*, Chu Kaihui, Shao Xiumei, Yuan Yonggang, Liu Dafu, Chen Xinyu, and Li Xiangyang
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    The fabrication and characterization of GaN-based 512×1 ultraviolet linear photodetector are reported in this work. AlGaN multilayers are grown in wetel-organic chemical vapor deposition (MOCVD). Material etching,passivation,metal contact and other techniques are used in the manufacture of 256×1 back-illuminated AlGaN detector. The current-voltage (I-V) curve shows that current at zero bias is 4.22×10-12A and resistance is 1.01×1010Ω. A flat band spectral response is achieved in the 305-365 nm. The detector displays an unbiased responsivity of 0.12 A/W at 359 nm. This detector is bonded to a readout circuit with capacitive feedback transimpedance amplifier (CTIA) structure. Two modules are put together to form 512 linear ultraviolet focal plane arrays (FPA). The FPA is measured in 300 K and achieved average voltage responsivity 1.8×108 V/W,the blind rate 9.0% and the response nonuniformities 17.8%. The measurement of signal and noise led to a detectivity of 7×1010cmHz1/2W-1 at 359 nm.

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    Zhang Yan, Chu Kaihui, Shao Xiumei, Yuan Yonggang, Liu Dafu, Chen Xinyu, Li Xiangyang. GaN-based 512×1 Ultroviolet linear Focal Plane Arrays[J]. Acta Optica Sinica, 2009, 29(12): 3515

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    Paper Information

    Category: Optical Devices

    Received: Oct. 21, 2008

    Accepted: --

    Published Online: Dec. 23, 2009

    The Author Email: Yan Zhang (zhangyan@mail.sitp.ac.cn)

    DOI:10.3788/aos20092912.3515

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