A novel inverse feedforward control algorithm was developed based on inverse Bouc-Wen feed-forward control and feedback control for improving the trajectory tracking performance of a Piezoelectric Actuator (PEA). A Bouc-Wen hysteresis dynamic modeling for the PEA was established, and system parameters of the Bouc-Wen model were identified by Particle Swarm Optimization (PSO) method. Then, a feed-forward compensation control method was proposed based on hysteresis Bouc-Wen model. Finally, the inverse feed-forward control method combining the PI feedback control with feed-forward control were proposed to control the piezoelectric actuator. An experimental platform was developed based on dSPACE system. The hysteresis experiment results show that the hysteresis error and relative linearity of the proposed method is almost zero and 96.5%, respectively. The trajectory tracking experimental results show that the maximum tracking error and RMS tracking error of the proposed method are 0.180 5 μm and 0.055 4 μm, respectively, obtaining the high tracking performance by 10－8 m. As compared with open loop control, feedforward control, PI feedback control, the proposed inverse feedforward control algorithm compensates basically hysteresis nonlinearity of the PEAs and shows good trajectory tracking performance.