Laser & Optoelectronics Progress, Volume. 59, Issue 5, 0522001(2022)

Design of Large-Aperture Rectangular SiC Scanning Mirror Assembly

Yanwei Li1, Jingguo Zhang2、*, Xinwang Xie1、**, Taixi Chen1, and Leigang Dong1
Author Affiliations
  • 1Ji Hua Laboratory, Foshan , Guangdong 528200, China
  • 2Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun , Jilin 130033, China
  • show less

    To reduce the weight of the large-aperture (740 mm × 480 mm) rectangular scanning mirror and ensure the surface accuracy of the mirror, this study proposes a lightweight structure design with back openings, mainly triangular lightweight holes, and a lightweight rate of 81.4% by combining the two- and three-dimensional equivalent stiffness models. Based on the principle of ball joint and flexible hinge, two types of scanning mirror components with different three-point back support modes are designed. The finite element analysis results show that under the coupling condition of Y-direction gravity and a uniform temperature difference of 40 ℃, the root-mean-square (RMS) value of the mirror surface error of the ball joint and flexible hinge support structure are 12.3 nm and 12.9 nm, respectively, which satisfies the optical design requirement of less than or equal to 0.025λ (wavelength λ=632.8 nm). Furthermore, the first-order natural frequencies are 68.1 Hz and 85.5 Hz, and the flexure hinge structure had better stiffness. The surface error of the flexure hinge scanning mirror is measured using the autocollimation method. The measurement results show that the surface error RMS value is 0.025λ. This result provides a reference for developing a large-aperture rectangular scanning mirror assembly.

    Tools

    Get Citation

    Copy Citation Text

    Yanwei Li, Jingguo Zhang, Xinwang Xie, Taixi Chen, Leigang Dong. Design of Large-Aperture Rectangular SiC Scanning Mirror Assembly[J]. Laser & Optoelectronics Progress, 2022, 59(5): 0522001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Optical Design and Fabrication

    Received: Oct. 25, 2021

    Accepted: Dec. 1, 2021

    Published Online: Feb. 22, 2022

    The Author Email: Zhang Jingguo (hitzjg@126.com), Xie Xinwang (xxw432536@sina.com)

    DOI:10.3788/LOP202259.0522001

    Topics