Optics and Precision Engineering, Volume. 32, Issue 5, 635(2024)
High-precision angle measurement based on two-dimensional hybrid position encoding
For high-end manufacturing equipment or precision measurement instruments featuring precision rotating shafting, traditional circular grating struggles to negate the impact of eccentricity error on angle measurement accuracy. This paper introduces a highly precise method for measuring rotation angles utilizing two-dimensional hybrid position coding. Initially, the system comprises a two-dimensional hybrid position coding disk, two CCD cameras, and a telecentric lens. This assembly is attached to a precision rotating shaft to capture its rotation angle. Subsequently, an angle measurement model is developed, mathematically verifying that measurement accuracy remains unaffected by installation eccentricity. The method's accuracy is validated using a multi-tooth indexing table, confirming that angle measurement error is confined to within ±1". Furthermore, when applied to assess the angle positioning accuracy of a direct drive turntable, the method achieves an angle positioning error within ±5". Unlike traditional circular grating measurements, this approach eliminates the need to account for the impact of eccentricity error on accuracy, offering robustness and simplicity in application. Thus, it proves effective for detecting angle positioning errors.
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Huining ZHAO, Jie WEN, Haojie XIA. High-precision angle measurement based on two-dimensional hybrid position encoding[J]. Optics and Precision Engineering, 2024, 32(5): 635
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Received: Oct. 7, 2023
Accepted: --
Published Online: Apr. 2, 2024
The Author Email: ZHAO Huining (hnzhao@mail.hfut.edu.cn), XIA Haojie (hjxia@hfut.edu.cn)