Chinese Journal of Lasers, Volume. 42, Issue 1, 108002(2015)
Active Control Technology to Correct the Quality of the Grating Wave-Front
Diffracted wave- front quality is one of the most important performance indexs for ruled gratings. For mechanically ruled gratings, positioning accuracy of the groove directly affects the wave- front quality of the gratings. The mathematical relationship between the inherent errors of the ruling machine which including the error of groove position, error of yaw and wave-front error of the gratings is developed, and the impact of various errors on the wave- front quality is analyzed. According to the error of groove position and error of yaw, a measure optical path is designed based on double-frequency laser interference, and a method to correct the error of groove position and error of yaw is proposed using piezoelectric actuator. According to the correction method, a double workbench is designed, and the ruling experiments for the size of 80 mm × 60 mm and groove density of 194 line/mm are carried out. The results show that the diffracted wave-front error of the ruled grating is reduced from 0.23λ to 0.093λ (λ = 632.8 nm) , and testing quality of the groove by atomic force microscope meets the requirement of the theoretical design.
Get Citation
Copy Citation Text
Yang Chao, Yu Haili, Zhang Shanwen, Yu Hongzhu, Li Xiaotian, Tang Yuguo. Active Control Technology to Correct the Quality of the Grating Wave-Front[J]. Chinese Journal of Lasers, 2015, 42(1): 108002
Category: measurement and metrology
Received: Jun. 13, 2014
Accepted: --
Published Online: Dec. 29, 2014
The Author Email: Chao Yang (yangchaoby@sina.com)