Chinese Journal of Lasers, Volume. 42, Issue 1, 108002(2015)

Active Control Technology to Correct the Quality of the Grating Wave-Front

Yang Chao1,2、*, Yu Haili1, Zhang Shanwen1, Yu Hongzhu1, Li Xiaotian1, and Tang Yuguo1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    Diffracted wave- front quality is one of the most important performance indexs for ruled gratings. For mechanically ruled gratings, positioning accuracy of the groove directly affects the wave- front quality of the gratings. The mathematical relationship between the inherent errors of the ruling machine which including the error of groove position, error of yaw and wave-front error of the gratings is developed, and the impact of various errors on the wave- front quality is analyzed. According to the error of groove position and error of yaw, a measure optical path is designed based on double-frequency laser interference, and a method to correct the error of groove position and error of yaw is proposed using piezoelectric actuator. According to the correction method, a double workbench is designed, and the ruling experiments for the size of 80 mm × 60 mm and groove density of 194 line/mm are carried out. The results show that the diffracted wave-front error of the ruled grating is reduced from 0.23λ to 0.093λ (λ = 632.8 nm) , and testing quality of the groove by atomic force microscope meets the requirement of the theoretical design.

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    Yang Chao, Yu Haili, Zhang Shanwen, Yu Hongzhu, Li Xiaotian, Tang Yuguo. Active Control Technology to Correct the Quality of the Grating Wave-Front[J]. Chinese Journal of Lasers, 2015, 42(1): 108002

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    Paper Information

    Category: measurement and metrology

    Received: Jun. 13, 2014

    Accepted: --

    Published Online: Dec. 29, 2014

    The Author Email: Chao Yang (yangchaoby@sina.com)

    DOI:10.3788/cjl201542.0108002

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