Laser & Optoelectronics Progress, Volume. 55, Issue 6, 061602(2018)
Application of Three-Layer Silicon Nitride Antireflection Coatings in Mono-Crystalline Silicon Solar Cells
The reflectivity, internal and external quantum efficiency, minority carrier lifetime and electrical characteristics of mono-crystalline silicon solar cells with double-layer and three-layer silicon nitride antireflection coatings are compared. The optical characteristics of double-layer and three-layer silicon nitride antireflection coatings are simulated. The results show that, the three-layer silicon nitride antireflection coating has a better antireflection effect and a better output characteristic. The double-layer and three-layer silicon nitride antireflection coatings are fabricated on P-type mono-crystalline silicon by the plasma enhanced chemical vapor deposition (PECVD) process. The analysis results of their antireflection and passivation effects show that the three-layer silicon nitride antireflection coating has a smaller reflectivity and a better passivation effect compared with the double-layer silicon nitride antireflection coating. The electrical characteristic testing results of the mono-crystalline silicon solar cells with double-layer and three-layer silicon nitride antireflection coatings show that the conversion efficiency of the mono-crystalline silicon solar cells with three-layer silicon nitride antireflection coating is relatively higher than that with double-layer silicon nitride antireflection coating.
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Xinjian Ma, Zhihua Si, Dong Yang, Tao Lin, Shuaichen Feng. Application of Three-Layer Silicon Nitride Antireflection Coatings in Mono-Crystalline Silicon Solar Cells[J]. Laser & Optoelectronics Progress, 2018, 55(6): 061602
Category: Materials
Received: Nov. 7, 2017
Accepted: --
Published Online: Sep. 11, 2018
The Author Email: Ma Xinjian (932594765@qq.com)