Infrared and Laser Engineering, Volume. 48, Issue 2, 206003(2019)

Study on ejection mechanism of copper film induced by nanosecond laser

Huang Yajun1,2、*, Cai Wenlai1,2, Chen Yinghuai1,2, and Huang Zhigang1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less

    Laser induced ejection mechanism of micron thick copper film was studied using nanosecond Nd:YAG laser pulses. By carrying out the experiments with different energy of laser pulses 10-500 μJ, three different ejection regimes were revealed: no ejection, stable ejection and sputtering. In the stable ejection regime, the forward and backward ejection were found to be simultaneously induced by a single laser shot. This phenomenon opened a way to the fabrication of microstructures on both the receiving and the donor substrate. The temperature field and the phase transition in the copper film were analyzed using the finite element method, which revealed that the laser-induced ejection was mainly caused by the hydrodynamics behavior of the molten and the evaporated material. The laser energy thresholds for stable ejection were characterized based on the thermodynamics calculations. The laser induced hydrodynamics behavior (bubble dynamics) was well described by the Rayleigh-Plesset equation, and which was solved numerically in the paper. It was discovered that rapid bubble expansion and collapse were the main causes of the forward and backward ejections, respectively. Based on the experimental and numerical findings, the controlling schemes of the laser pulse parameters for the stable ejections were introduced.

    Tools

    Get Citation

    Copy Citation Text

    Huang Yajun, Cai Wenlai, Chen Yinghuai, Huang Zhigang. Study on ejection mechanism of copper film induced by nanosecond laser[J]. Infrared and Laser Engineering, 2019, 48(2): 206003

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: 激光技术及应用

    Received: Sep. 12, 2018

    Accepted: Oct. 26, 2018

    Published Online: Apr. 5, 2019

    The Author Email: Yajun Huang (604616986@qq.com)

    DOI:10.3788/irla201948.0206003

    Topics