Acta Optica Sinica, Volume. 20, Issue 8, 1065(2000)
Expanding Depth Measurement Range by White-Light Phase-Shifting Interferometry
A new approach for measuring the surface profile is presented. It measures the surface profile not by measuring phase but by measuring the parameters, which is relative to the white-light phase-shifting interferometric intensity and monotonic function of the depth of the tested surface in the given measurement range. Advantage of the approach is that the depth measurement range is expanded very much, it can be used to measure the profile of the deep or discontinuous surface.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Expanding Depth Measurement Range by White-Light Phase-Shifting Interferometry[J]. Acta Optica Sinica, 2000, 20(8): 1065