Micro-structures are a few typical elements of micro-electromechanical system (MEMS). The physical dimensions, motion characteristics, material and mechanical properties have important influences on the system performance of MEMS device. An optical measurement platform for static and dynamic characteristics of micro-structures is put forward. Computer micro-vision, Mirau microscopic interferometry, stroboscopic photography and laser Doppler vibrator are integrated into this platform. In-plane and out-of-plane periodic motion characteristics of micro-resonator are measured, and out-of-plane transient motion of micro-mirror is analyzed. In-plane displacement, motion phase and resonance frequency can be measured by integrating computer micro-vision with stroboscopic photography, and the repeatable accuracy of in-plane displacement is 30 nm. Out-of-plane displacement and tolerance can be measured by integrating Mirau microscopic interferometry with stroboscopic photography, and the repeatable accuracy of out-of-plane displacement is 3 nm. Laser Doppler vibrator has an advantage of analyzing the motion in frequency domain, and it is the complementarity of measuring periodic motion in time domain.