Chinese Optics Letters, Volume. 10, Issue 12, 122501(2012)

Improvement of InGaAs/GaAs vertical-cavity surface-emitting lasers by post-oxidation annealing

Changling Yan, Yun Deng, Peng Li, Xiaomao Song, and Jianwei Shi

InGaAs/GaAs vertical-cavity surface-emitting lasers (VCSELs) are fabricated by a thermal selective wet-oxidation confinement technique. Post-oxidation annealing in a nitrogen environment at high temperatures is then conducted to improve the performance of the oxide-confined InGaAs/GaAs VCSELs. The optimum post-oxidation annealing conditions are determined by changing the furnace temperature and annealing time. Compared with a unannealed laser device, the light output power increases by about 12%. An aging test is carried out to examine the reliability of the annealed oxide-confined VCSEL device. The temperature dependence of the lasing wavelength of the annealed oxide-confined VCSELs is also investigated.

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Changling Yan, Yun Deng, Peng Li, Xiaomao Song, Jianwei Shi. Improvement of InGaAs/GaAs vertical-cavity surface-emitting lasers by post-oxidation annealing[J]. Chinese Optics Letters, 2012, 10(12): 122501

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Paper Information

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Received: Apr. 27, 2012

Accepted: Jul. 10, 2012

Published Online: Oct. 19, 2012

The Author Email:

DOI:10.3788/col201210.122501

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