Chinese Journal of Lasers, Volume. 28, Issue 7, 661(2001)

Pulsed Laser Ablation Deposition of Crystalline ZnSe Thin Films

[in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2Department of Chemistry, Chungnam National University, Taejon 3052764, Koreaand Center for Molecular Science, 371-1 Kusung-dong Yusung-gu, Taejon 305-701, Kore
  • show less

    Crystalline ZnSe thin films have been deposited on polished GaAs(100) substrates by pulsed laser ablation of a single target of polycrystalline ZnSe solid using KrF 248 nm excimer laser. Chemical etching and high temperature heating were used for pretreatment of substrates. Atomic force microscopy (AFM) shows that the average roughnesses of ZnSe thin films can reach 3~4 nm. X ray diffraction (XRD) shows that FWHM of ZnSe (400) peaks are 0.4°~0.5°. Analysis of quadruple mass spectroscopy for laser ablated plumes indicates that the plumes consist of Zn, Se and 2Se. It was deduced that ZnSe thin film was grown in two dimensional mode.

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Pulsed Laser Ablation Deposition of Crystalline ZnSe Thin Films[J]. Chinese Journal of Lasers, 2001, 28(7): 661

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: laser manufacturing

    Received: Apr. 3, 2000

    Accepted: --

    Published Online: Aug. 10, 2006

    The Author Email:

    DOI:

    Topics