Chinese Optics Letters, Volume. 10, Issue s2, S21407(2012)

Novel optical f iber-based laser direct writing process for micromachining of metal

Kwang H. Oh, S. S. Woo, H. S. Jeong, Y. W. Yi, and S. H. Jeong

A laser micromachining technique for the fabrication of metallic microstructures is proposed. The fabrication of microstructures is done by laser-induced wet etching that adopts an optical fiber as a machining tool. The laser beam delivered through the multimode fiber directly irradiates on the workpiece while maintaining a proper gap to avoid fiber damage. The manufacture of microstructures with high surface quality and good size uniformity is realized. Microgrooves with aspect ratio over 10 and microholes with a nearly straight cross-section can be produced by the proposed technique. The overall etching results are examined closely with respect to process variables.

Tools

Get Citation

Copy Citation Text

Kwang H. Oh, S. S. Woo, H. S. Jeong, Y. W. Yi, S. H. Jeong. Novel optical f iber-based laser direct writing process for micromachining of metal[J]. Chinese Optics Letters, 2012, 10(s2): S21407

Download Citation

EndNote(RIS)BibTexPlain Text
Save article for my favorites
Paper Information

Category: Lasers and Laser Optics

Received: Mar. 20, 2012

Accepted: Aug. 13, 2012

Published Online: Dec. 6, 2012

The Author Email:

DOI:10.3788/col201210.s21407

Topics